|
Featuring increased processing capacity, C.O.O. reduction and user-friendly operation, the Spin Scrubber SS-3000 supports next generation processes using 300 mm wafers. While offering a reduced footprint, its cleaning performance has been greatly enhanced to pass newer, stricter evaluation criteria.
Thus the SS-3000 is ideal for the increasingly reduced size of design rules, ensuring an ample process margin. Reduced chemical and DI water use combined with high speed processing will minimize your running costs. Maintenance and other operations have been extensively automated to facilitate overall operability.
1. Upgraded cleaning capacity
Each process function has been upgraded to provide uniform cleaning from wafer centers to edges, especially with the larger 300 mm wafers, offering higher production rates. Evaluation of its cleaning capacity has been made using ultra-strict criteria compared with conventional cleaners. Removal capacity and contamination adhesion have been evaluated with regard to the particles of 0.1 µm level for ensuring the applicability to next generation design rule shirinks.
2. Minimal running costs
A clean telescopic transfer unit allows processing up to 144 wafers per hour. An optimized cleaning environment ensures reduced use of SC1 and other chemicals, while shorter piping eliminates chemical loss. The advanced overall design of the SS-3000 provides greatly reduced running costs.
3. Wide range of cleaning functions
All cleaning tools, including 2 kinds of brushes, a D-Sonic unit, a Jet spray unit and additional apparatus, can be incorporated in a single scrub module, enabling a wide range of process applications.
4. Compact design
High pressure jet pumps, SC1 mixing units and D-Sonic units are built-in and have been greatly reducing the footprint of the SS-3000.
5. User-friendly operation and maintenance
Automatic robotics teaching simplifies adjustment to the wafer transfer system. Also incorporated are automatic control systems for DI water dispense values, relative resistance, Jet dispense values, and a host of other features, while a portable maintenance panel provides maximum convenience for maintenance personnel. Moreover, the SS-3000 is designed in compliance with global standards and its user-friendly GUI facilitates manufacturing and maintenance for any customer.
6. CD-ROM documentation
CD-ROM documentation including operation manuals, parts lists, and other material allows convenient reference in paper-less clean rooms.
Return to top
|
