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Features...
- Supports new chemicals More...
- Chemical carry-over suppressed More...
- Uniform polymer removal More...
- Efficient chemical circulation More...
- Low pressure single wafer bake More...
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Recent leading-edge multi-layer technology and CD
shrink for semiconductor devices require far more strict removal of residual
polymers than ever. In response to this, Dainippon Screen has developed the
SR-3000 polymer remover which provides an optimal processing capacity to a wide
range of polymers, besides supporting large 300mm wafers.
SR-3000 features a wide selection of
chemicals, the most advanced polymer removal capability, optimal processing
control, high cleanliness, and a flexible system configuration matched to any
production capacity, enabling an ideal support for the production of next
generation semiconductor devices.
1. Supports New Chemicals
There is a wide range of specifications to enable the removal of any kind of
polymer. It also supports new chemicals, which are used in Cu interconnect and
low-k processes. Furthermore, it can provide physical cleaning with high
pressure fluid and varying sprays in addition to conventional chemical cleaning.
Thus, much higher polymer removal efficiency than conventional batch chemical
cleaners is available while at the same time suppressing metal corrosion and
oxide etching.
2. Chemical Carry-Over Suppressed
Its single wafer processing method allows a speedy switching from chemical
cleaning to DI water rinsing. As a result, it needs no intermediate rinsing,
which has been necessary for conventional batch cleaners. In addition, any
chemical carry-over can also be suppressed.
3. Uniform Polymer Removal
It features an easy process control and provides uniform polymer removal results
at high repeatability.
4. Efficient Chemical Circulation
Its advanced chemical circulation system allows an efficient reduction of
chemical use.
5. Low Pressure Single Wafer Bake
The dryer (DPH) which dehydrates wet-cleansed wafers using low-pressure
single-wafer bake can be applied to the SR-3000 as an option. DPH :
Depressurized Hot Plat.
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