Advanced Batch Cleaning System : Highest Throughput Get Lowest Chemical Consumption

Features...

1. Significant C.O.O. reductions More...
2. Support for a wide variety of cleaning processes More...
3. Single-bath cleaning system More...
4. Elimination of water marks More...

The FC-821L integrates our finest chemical circulation cleaning technologies, perfected in our renowned multi-bath Wet Stations, into an unprecedentedly efficient single-bath cleaning system. The system also incorporates a low pressure dryer to prevent water mark generation during the drying processes.

The FC-821L meets all the rigorous challenges of next-generation cleaning by realizing quarter-micron processing with accelerated throughput yet reduced chemical consumption. By decreasing cleaning units, as in the popular FS-820L, we can offer compact designs and radical space savings than previous multi-bath systems.

Installing the FC-821L directly adjoining the next process equipment significantly slashes space demands in limited clean room environments. Moreover, the consequent minimized wafer transfer between processings greatly inhibits the generation of native oxides and other contamination.

1. Significant C.O.O. reductions
Inter-wafer intervals in processing baths have been halved, allowing highly compact bath design and consequent chemical and DI water savings as well as accelerated throughput.

2. Support for a wide variety of cleaning processes
The CHB chemical circulating bath allows processing with even high-temperature and high-concentration chemicals.

3. Single-bath cleaning system
Since a series of processes from chemical cleaning through rinsing can be performed in a single bath, full saturation of fine pattern interiors can be effectively maintained in a wet condition throughout processing. Furthermore, up to five types of chemicals can be sequentially used here, supporting a wide range of cleaning processing.

4. Elimination of water marks
The FC-821L incorporates a low pressure dryer unit that totally eliminates water mark generation.

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