|
A low cost-of-ownership cleaning system featuring high process
performance, superior drying performance, and flexible integration to factory
automation.
1. Reduced Foot Print
Provides low COO and installation
flexibility for new
or existing fabs.
Fixed footprint provides a standardized facilities layout.
Elimination of custom tools for different applications (reduced parts inventories,
standardization, reduced training requirements, etc.).
2. Chemical Recirculation Bath
Flexible configuration for multiple applications (all within the same mechanical
platform).
Lower bath volume and chemical consumption.
3. Reduced Accumulated Contamination
Improved process results and particle control with
better cleaning of high aspect ratio topologies (e.g.; trench
and via) by continuous submersion processing.
Elimination of air / liquid interface.
4. Reduced Waste and DIW Usage
Smaller bath volume (<50% the size of QDR bath), reduced chemical / DiW
consumption,
and elimination of dead zones.
5. User Friendly Interface
Windows NT operating system, featuring graphical recipe programming. User friendly
interface meets automation and integration requirements.
Return to top
|
