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The WS-820L Wet Station is a casetteless wafer cleaning
system for 8-inch wafers. You can custom configure processing lines to meet your
precise needs simply by combining compactly designed interface, processing,
drying and transfer modules. The WS-820L is further distinguished by its
high-tolerance processing, stability, and ease of operation and maintenance.
Designed with an eye to the ongoing progress of factory automation, the WS-820L
sets new benchmarks for productivity and advances the overall rationalization of
the wafer rinsing process.
1. Cassetteless Cleaning
Because of cassetteless cleaning, chemical carry-over is greatly reduced and
wafer contamination due to cassettes can be eliminated.
2. Modular Design
Modular equipment design which allows you to freely configure your system and
speeds delivery time.
3. Transfer Unit
The transfer unit moves smoother and faster, and is easier to maintain since the
unit is entirely operated from the front side.
4. Stable
Stable, high-quality wet processing is facilitated with bath designs
fashioned to optimize their respective functions with new visible fluid flow
technology, rigorous chemical controls, and a clean-type dryer section.
5. Easy Operation
The equipment is designed for easy operation from dialogs on the monitor
screen, which can also display the active processing program, its current
progress, and areas requiring maintenance.
6. Chemical Circulation
The chemical circulation unit can be physically separated from the main
processing section. Maintenance is also facilitated from the rear side because
the piping connections are located to the bottom of the equipment.
7. Communication
A function allowing online communication with an upstream host computer can
also be added to the equipment. We have also prepared other peripheral devices
such as wafer conveyers and cassette stockers.
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