|
Features...
- High Speed Indexer More...
- Total Cleanliness More...
- 4-Stage Oven More...
- Improved Process Performance More...
- Ease of Operation and Maintenance More...
|
|
The D-SPIN8 is a spinner that has been developed
with the emphasis on operation ease and high throughput. In spite of its compact
design, the D-SPIN8 offers you outstanding processing capabilities. Wafer
transfer speed has been increased for higher productivity. Process Performance
and cleanliness have been upgraded to maintain high yield. Dedicated panels and
various new software features designed for easier operation and maintenance have
been added on, increased automation has been achieved, and parts have been
reduced and standardized. What's more, the system can be configured flexibly,
and necessary processing units can be incorporated in limited equipment internal
space.
1. High Speed Indexer
A high-speed indexer and a faster wafer transfer unit ensure higher throughput.
A flexible flow function ensures that wafers having different flow are
continuously processed with maximum efficiency.
2. Total Cleanliness
Outstanding mechanisms assure you of total cleanliness: particle-free stationary
cassette type indexer, clean transfer system, automatic cup cleaning function,
baffle disk in the spin coater, and piping that uses neither sealing tape nor
metal parts.
3. 4-Stage Oven
he D-SPIN8 incorporates the 4-stage oven made popular in the D-SPIN Series. This
allows the spinner to be designed 20% smaller than our previous model. An edge
bead exposure unit and chemical temperature control units can also be built into
oven unit space, allowing the effective use of limited space.
4. Improved Process Performance
A wide range of new mechanisms have been added on for improving process
performance and accuracy.
5. Ease of Operation and Maintenance
Simplified Keyboard operation, maintenance- and chemical control dedicated
operation panels, fewer parts and use of standardized parts greatly improve ease
of operation and maintenance.
Return to top
|
